Two PPP consortia will kick-off for improving cyber-physical systems

January 19, 2023

Reliable Next Generation Actuation Systems project of prof. dr. E.A. Lomonova awarded

NWO has awarded two projects that aim to improve the performance of high-tech systems, in particular cyber-physical systems. Within the projects, knowledge institutions are working together with industrial partners on reliable high-tech motion systems for lithography machines, for example. PPP research is also starting to establish diagnostic methods for complete high-tech systems, such as MRI scanners.

The grants come from the call Next Generation High-tech-Equipment: cyber-physical systems (KIC).

The call aims to work on multidisciplinary integration of cyber-physical systems. The physical and digital components of a cyber-physical system are inseparable. By improving the interaction between the two components, progress is possible in areas such as efficiency, affordability and predictability. The Netherlands is an international leader in ultra-precise high-tech equipment. As such, the Dutch high-tech industry makes an important contribution to the prosperity and earning power of the Netherlands.


REGENERATE: Reliable Next Generation Actuation Systems - prof. dr. E.A. Lomonova (Eindhoven University of Technology)

Linear electromagnetic actuators are used in high-tech motion systems. They for example enable the positioning of wafers with nanometer precision in lithography machines. Increasing requirements on actuator acceleration and precision have led to higher mechanical, electromagnetic and thermal stresses and non-recoverable failures. Actuator reliability has therefore become a major concern, but failure mechanisms are currently poorly understood. In this multidisciplinary project we study the main failure mechanisms of actuators, using models ranging from the atomistic to the mechanical scale combined with experimental measurements. The outcomes are used to improve future linear actuator systems and reliability at partners ASML and Tecnotion.


Eindhoven University of Technology, Research Institute for Mathematics and Computer Science (CWI), Delft University of Technology.

Consortium partners

Co-funders: ASML, Tecnotion.

ZORRO: Engineering for Zero Downtime in Cyber-Physical Systems via Intelligent Diagnostics - prof. dr. M.I.A. Stoelinga – University of Twente

No more system malfunctions? The ZORRO project is working on diagnostic methods for high-tech systems, such as MRI scanners and printers. By continuously monitoring their behaviour with suitable sensors, algorithms from AI can detect anomalous patterns and relate these to their root causes. Suitable measures, such as replacements or repairs, can then prevent failures. We aim at breakthroughs in complexity with ZORRO: not diagnostics for simple components, but for entire systems; efficient monitoring systems that combine different sensor types; automation of diagnostic processes by capturing domain knowledge in diagnostic models and integrate these into the engineering process for high-tech systems.


Saxion University of Applied Sciences, Vrije Universiteit Amsterdam.

Consortium partners

Co-funders: ESI TNO, ASML, CPP, ITEC, Philips, TFS.

The research program Next Generation Hightech Equipment: cyber-physical systems (KIC) is in line with the Knowledge and Innovation Agenda (KIA) for Key Enabling Technologies, and specifically with the national investment programme NXTGEN HIGHTECH, in-depth program Cyber Physical Systems.

KIC seeks technological economic opportunities

The NWO research program KIC focuses on groundbreaking innovative solutions with societal and economic impact. Companies, knowledge institutions and government bodies jointly invest in the commercial application of knowledge to tackle major societal challenges through the use of smart technologies. By doing this, both jobs and income can be secured for the future. This is established in the Knowledge and Innovation Covenant (KIC) 2020-2023 that connects with the Mission-driven Top Sectors and Innovation Policy of the Dutch government. NWO brings together companies and knowledge institutions and funds groundbreaking research based on their innovative, high-impact research proposals.


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