AFM Nanostage 3D translation stage


Control Systems Technology research group, Professor M. Steinbuch, PhD, in cooperation with Constructions and Mechanisms, Dr P.C.J.N. Rosielle, TU/e department of Mechanical Engineering.
PhD subject of C. Werner, MSc


The Nanostage 3D translation stage is part of a metrological Atomic Force Microscope (AFM) with a large measurement volume. The stage contains elastic parallel guidances and three Lorentz actuators to move the sample. The AFM head itself remains stationary. Stiffness and weight compensation mechanisms minimize the generation of heat in the actuators. The sample displacements are measured by three in-house designed differential interferometers.
More information can be found on


  • Measurement volume: 1x1x1 mm
  • Resolution stage: < 0.3 nm
  • Dimensions: diameter 250 mm, height 170 mm