Contact-free measuring machine for aspherical and freeform optics in optical systems. The measuring machine consists of three subsystems: the motion system, the contact-free scanning probe and a measuring loop. A special contact-free scanning probe developed within the project scans the surface. This contact-free scanning probe has a range of 5 millimeters and nanometer accuracy. To prevent a long measuring loop and corresponding measurement errors, a special metrology frame is added and the position of the scanning probe relative to that frame is measured interferometrically. The motion guidance consists of air bearings and is adjusted by linear motors using a Dspace system.

• Universal measuring of freeform and aspherical surfaces
• Measurement volume: 500mm diameter and 100 mm height
• Both convex and concave, up to 45°
• Contact-free
• Measurement uncertainty of 30 nm