Skip to content
Menu
Close the menu
Menu
Eindhoven
University of
Technology
Search
Nederlands
NL
Search
Our university
About the University
TU/e Strategy 2030
Organization
Support Services
World-leading university in cooperation with industry
TU/e Alumni Community
TU/e Sustainability
Publications
Integrity
Social Safety
Equity, Diversity and Inclusion
Student wellbeing
Vitality
Security
Facilities
University alliances & networks
EuFlex Technificent
Departments
Applied Physics and Science Education
Biomedical Engineering
Built Environment
Chemical Engineering and Chemistry
Eindhoven School of Education
Electrical Engineering
Industrial Design
Industrial Engineering and Innovation Sciences
Mathematics and Computer Science
Mechanical Engineering
Calendar and events
Academic events
TU/e Campus
Accessibility
Study on campus
Living on campus
Business on campus
Work on campus
Buildings
TU/e Art Collection
Campuses in the Netherlands
Library
Collections in the spotlight
Resources
Library for researchers and PhDs
Library for students
Library for lecturers
How to use the library
Facts & figures
Calendar
Library news
FAQ
Community
Overview communities
Student teams
Home
Our university
Calendar and events
PhD defense Nic Jasp...
Wafer Stage Motion Control
PhD defense Nic Jasper Dirkx
Directly to
PhD thesis of
Nic Jasper Dirkx
Date
Friday October 6, 2023
Organisational Units
Group Oomen
Place
TU/e Campus
Thesis (Full text)
Eindhoven
University of
Technology
Education
Research
Our university
Working at TU/e
News and Events
Impact
TU/e Image Bank
Educationguide
Intranet
Cursor
Education
Education
Education
Why study at TU/e
Bachelor College
Graduate School
Professional Education
Degree programs
Become a TU/e student
TU/e innovation Space
Research
Research
Research
Institutes
Research Areas
Research Groups
Research Labs
Researchers
Departments
Grants & Awards
Research Support Network
Our university
Our university
Our university
About the University
Departments
Calendar and events
TU/e Campus
Library
Community
Student teams
Working at TU/e
Working at TU/e
Working at TU/e
Scientific Staff
Support Staff
PhD
EngD
Why TU/e
News and Events
News and Events
News and Events
News overview
Media relations
Impact
Impact
Impact
The Gate
Eindhoven Engine
TU/e Participations
Starting your business
Intellectual Property
TU/e Image Bank
Educationguide
Intranet
Cursor