H. (Hans) Butler - Expertise

Butler, H.
Address :
Technische Universiteit Eindhoven
P.O. Box 513
Chair :
Lithographic Scanner Control
Department :
Department of Electrical Engineering
Section :
Control Systems
Positioncategory :
Professor (HGL)
Position :
Full Professor
Room :
FLX 5.130
Tel :
+31 40-247 3577
Tel (internal) :
Email :

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Hans Butler obtained his M.Sc. and Ph.D. degrees on model reference adaptive control at Delft University of Technology in 1986 and 1990, respectively. In 1991 he joined ASML, and since has worked on multiple components in lithographic tools as a control engineer, such as handlers, illuminators, projection systems, and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and, more recently, dynamics, vibration isolation and damping. Since 2010 he is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. In 2012 he was appointed part-time professor on "Lithographic Scanner Control".

Keywords: Motion control, Dynamics, Mechatronic architecture, Control systems, Vibration isolation, Active damping, Optomechatronics