In situ optical probes of surface processes and interface formation during amorphous and epitaxial silicon thin film growth

Conference Contribution

Kessels, W.M.M., Gielis, J.J.H., Oever, van den, P.J., Hoex, B., Aarts, I.M.P., Pipino, A.C.R. & Sanden, van de, M.C.M. (2007). In situ optical probes of surface processes and interface formation during amorphous and epitaxial silicon thin film growth. In H.M. Branz, E.A. Schiff & B. Nelson (Eds.), ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA (pp. WeO4.1).

Abstract