Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition

Conference Contribution

Letourneur, K.G.Y., Engeln, R.A.H., Boogaarts, M.G.H., Sanden, van de, M.C.M. & Schram, D.C. (1999). Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France (pp. 12-15). (Vide: Science, Technique et Applications, No. 291). Paris: Société Française du Vide.

Abstract