High resolution optical frequency domain reflectometry for analyzing intra-chip reflections

Article

Zhao, D., Pustakhod, D., Williams, K. & Leijtens, X. (2017). High resolution optical frequency domain reflectometry for analyzing intra-chip reflections. IEEE Photonics Technology Letters, 29(16):7967818 In Scopus Cited 0 times.

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Abstract

 

We present a method for high-resolution optical frequency domain reflectometry by de-embedding group-velocity dispersion in the device under test. The method is shown to provide an accurate estimation of the wavelength-dependent group refractive index, and provides a spatial resolution of 5.3 ± 1.7,μ m for intra-chip reflections. We applied this method to characterize localized reflections from a number of waveguide crossings. The minimum distance of 30,μ m between two crossings could easily be resolved. The reflection of waveguide crossings was analyzed to be (2.5 ± 1.2)10-6.