A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Visiting addressGroene Loper 19Flux5612 AP EindhovenNetherlands
Postal addressP.O. Box 513Department of Electrical Engineering5600 MB EindhovenNetherlands
Meet some of our Researchers
Clarisse Bosman Barros
Most important projects
- Nanometer Accurate Positioning System (NAPAS) having the goal of creating a long-stroke planar actuator with nanometer accuracy, using modelling and control techniques to reduce quasi-static deformations as well as position-dependent resonant behavior.
- Impulse Feedforward techniques for time-varying positioning systems, in collaboration with ASML and Mechanical Engineering department.
- Advanced Large range Piezo stage (ALP) Creating a piezo-driven wafer stage, in collaboration with HTSC and ASML.
Our most recent peer reviewed publications
Convex incremental dissipativity analysis of nonlinear systemsAutomatica (2023)
Fast simultaneous estimation of nD transport coefficients and source function in perturbation experimentsScientific Reports (2023)
Physics–Guided Neural Networks for Feedforward Control(2023)
Temporal logic control of nonlinear stochastic systems using a piecewise-affine abstractionIEEE Control Systems Letters (2023)
Moment Based Model Predictive Control for Linear Systems: Additive perturbations caseInternational Journal of Robust and Nonlinear Control (2022)