Research Profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Contact
-
Visiting address
Groene Loper 19Flux5612 AP EindhovenNetherlands -
Visiting address
Groene Loper 19Flux5612 AP EindhovenNetherlands -
Postal address
P.O. Box 513Department of Electrical Engineering5600 MB EindhovenNetherlands -
Postal address
P.O. Box 513Department of Electrical Engineering5600 MB EindhovenNetherlands
Meet some of our Researchers
News
Most important projects
- Nanometer Accurate Positioning System (NAPAS) having the goal of creating a long-stroke planar actuator with nanometer accuracy, using modelling and control techniques to reduce quasi-static deformations as well as position-dependent resonant behavior.
- Impulse Feedforward techniques for time-varying positioning systems, in collaboration with ASML and Mechanical Engineering department.
- Advanced Large range Piezo stage (ALP) Creating a piezo-driven wafer stage, in collaboration with HTSC and ASML.
Recent Publications
Our most recent peer reviewed publications
-
Physics-guided neural networks for feedforward control with input-to-state-stability guarantees
Control Engineering Practice (2024) -
Koopman form of nonlinear systems with inputs
Automatica (2024) -
Learning Stable and Robust Linear Parameter-Varying State-Space Models
(2024) -
Data-driven feedforward control design for nonlinear systems
(2024) -
Direct data-driven state-feedback control of general nonlinear systems
(2024)