A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Visiting addressGroene Loper 19Flux5612 AP EindhovenNetherlands
Postal addressP.O. Box 513Department of Electrical Engineering5600 MB EindhovenNetherlands
Meet some of our Researchers
Clarisse Bosman Barros
Most important projects
- Nanometer Accurate Positioning System (NAPAS) having the goal of creating a long-stroke planar actuator with nanometer accuracy, using modelling and control techniques to reduce quasi-static deformations as well as position-dependent resonant behavior.
- Impulse Feedforward techniques for time-varying positioning systems, in collaboration with ASML and Mechanical Engineering department.
- Advanced Large range Piezo stage (ALP) Creating a piezo-driven wafer stage, in collaboration with HTSC and ASML.
Our most recent peer reviewed publications
Frequency response data-driven LPV controller synthesis for MIMO systems(2022)
Moment Based Model Predictive Control for Linear Systems: Additive perturbations caseInternational Journal of Robust and Nonlinear Control (2022)
On feedforward control using physics-guided neural networks: Training cost regularization and optimized initialization2022 European Control Conference, ECC 2022 (2022)
Learning-Based Model-Augmentation of Nonlinear Approximative Models using the Sub-Space Encoder41st Benelux Meeting on Systems and Control 2022 (2022)
Generalized feedforward control using physics-informed neural networksIFAC-PapersOnLine (2022)