Capacitance Voltage (CV) profiler

Capacitance-Voltage (CV) profiler

Name

Wafer Profiler CVP 21

Application

Carrier Density Measurement

Doping Profile Measurements after epitaxial-MOCVD-Growth

Characteristics

Accuracy depends upon type of junction-transition

Specimen

< or = 3-inch InP/GaAs wafers

User conditions

Only used by operator

Remarks

Special Electrolyte preparations required; Electrochemical CV-profiling is a destructive measurement