Capacitance Voltage (CV) profiler
Capacitance-Voltage (CV) profiler | |
Name | Wafer Profiler CVP 21 |
Application | Carrier Density Measurement Doping Profile Measurements after epitaxial-MOCVD-Growth |
Characteristics | Accuracy depends upon type of junction-transition |
Specimen | < or = 3-inch InP/GaAs wafers |
User conditions | Only used by operator |
Remarks | Special Electrolyte preparations required; Electrochemical CV-profiling is a destructive measurement |