Hitachi S-9920 CD-SEM
High Resolution automated CD measurements.
Hitachi S-9220 CD-SEM
Automated CD measurements for inline process control and process development.
SEM with programmable addressing, pattern recognition and measurement algorithms for various structures. Automated waferloading on 8-inch wafers. CD-SEM measurement data and photos can be accessed via Hitachi software using a Data Station.
8-inch and 3-inch wafers using a special wafer carrier (see remarks)
Smaller samples can possibly be used, but image distortion and loss of measurement accuracy should be expected with this. Alignment on wafer carrier requires < 0.3 degrees accuracy for addressing reliability.