Hitachi S-9920 CD-SEM
High Resolution automated CD measurements. | |
Name | Hitachi S-9220 CD-SEM |
Application | Automated CD measurements for inline process control and process development. |
Characteristics | SEM with programmable addressing, pattern recognition and measurement algorithms for various structures. Automated waferloading on 8-inch wafers. CD-SEM measurement data and photos can be accessed via Hitachi software using a Data Station. |
Specimen | 8-inch and 3-inch wafers using a special wafer carrier (see remarks) |
User conditions | Training/supervision/user/operator |
Remarks | Smaller samples can possibly be used, but image distortion and loss of measurement accuracy should be expected with this. Alignment on wafer carrier requires < 0.3 degrees accuracy for addressing reliability. |