High Resolution SEM JEOL 7500 FA

Name

High Resolution SEM JEOL 7500 FA

Application

Making (high resolution) SEM pictures

Making SEM pictures of wafers/devices during or after processing.

Characteristics

Low voltage SEM. Possible acceleration voltages 0.1-30 kV. Loadlock, SE detectors, BSE detectors

Specimen

Small samples up to 1.5 cm for cross section inspection. Wafers up to 2 inch for top down inspection.

User conditions

Requires training or supervision

Remarks