SEM ZEISS

SEM imaging

Name

ZEISSSigma

Application

High resolution SEM imaging

Characteristics

Acceleration Voltage 0.2 - 30 kV

Probe Current 4 pA - 20 nA

Resolution @ 1 kV 2.8 nm

Resolution @ 15 kV 1.5 nm

In-lens and ETSE detectors

Specimen

Small wafer(like) sample. Up to 25mmx25mm

User conditions

Operator

Remarks

No organic materials allowed. No resist processed samples.

Location

Spectrum 1.38