SEM ZEISS
SEM imaging | |
Name | ZEISSSigma |
Application | High resolution SEM imaging |
Characteristics | Acceleration Voltage 0.2 - 30 kV Probe Current 4 pA - 20 nA Resolution @ 1 kV 2.8 nm Resolution @ 15 kV 1.5 nm In-lens and ETSE detectors |
Specimen | Small wafer(like) sample. Up to 25mmx25mm |
User conditions | Operator |
Remarks | No organic materials allowed. No resist processed samples. |
Location | Spectrum 1.38 |