Surface profiler, Tencor

Tencor Surface profiler.

Name

Tencor Alpha-Step IQ

Application

Non-destructive step height measurement

Characteristics

10-20 nm resolution possible under optimum conditions.

Data Survey Statistics

Specimen

Wafer size < or = 4-inch wafers.

User conditions

Only used by operator

Remarks

Restrictions on measurements on uncured, solvent-rich polymer layers.