MBE Createc Metal

Mini Molecular Beam Epitaxy (MBE) reactor to grow epitaxial layers, Nano-wires for

Metals and Superconducting materials with Closed UHV system with load lock in Glovebox

Name

Mini Molecular Beam Epitaxy (MBE) CreaTec for metals and super conducting materials

Application

Molecular Beam Epitaxy (MBE) reactor for epitaxial growth of metals and superconducting materials for Nano wires.

UHV system with Load lock in Glove box to avoid oxidation of samples

Characteristics

Growing epitaxial layers on Nanowires with elements Al, Nb

Hydrogen cleaning

Oxygen free loading and unloading with Load lock in a glove box with N2 environment. H2O and O2 level <<0.1 PPM

Specimen

Maximal diameter of wafer 2 inch, ΒΌ inch Indium free with possibility for Indium and Ga mounting.

User conditions

Only internal trained operators

Remarks