AJA Magnetron Sputtering Tool

Sputtering system equipped with 4 sputterguns in sputter-up-mode.

Name

AJA ATC 1500-F Sputtering System

Application

Sputtering of Au, Ti, Ni, Cr, Pt ; RF-sputtering of isolators ; reactive gas sputtering of NbN.

Characteristics

Stepcoverage. Standard recipes available. No thickness monitoring available.

Specimen

Wafer size < or = 4-inch wafers

User conditions

Use only after extensive training, loading/unloading in manual mode.

Remarks