Au/Ag Thermal Evaporator, Edwards

Thermal evaporator

Name

Edwards Auto306 vacuum coating system

Application

Deposition of thin Ag layers for contacts or Au for charge reduction on EBL

Characteristics

Deposition of thin layers of Ag and Au in the range of tens of nanometers.

Specimen

Maximum size 2 inch.

User conditions

Requires training or supervision.

Remarks