Diamond tool scrbing, Karl Suss and Loomis

 

Name

Karl Suss, manual scriber ; Loomis PKR-99 ; Loomis LSD-100

Application

Accurate positioning of scribe lines.  cleaving of InP / GaAs wafers (smooth crystal plane cleaving for facets).

Characteristics

10-20 microns accuracy placement of scribelines. Automatic scribing possible

Specimen

Wafer size < or = 3-inch InP / GaAs wafers

User conditions

Only used by operator

Remarks

Loomis LSD-100 in use as Break System ; In general: scribing only for InP / GaAs Monocrystalline Semiconductors.