Diamond tool scribers, Karl Suss and Loomis
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Name | Karl Suss, manual scriber ; Loomis PKR-99 ; Loomis LSD-100 |
Application | Accurate positioning of scribe lines. cleaving of InP / GaAs wafers (smooth crystal plane cleaving for facets). |
Characteristics | 10-20 microns accuracy placement of scribelines. Automatic scribing possible |
Specimen | Wafer size < or = 3-inch InP / GaAs wafers |
User conditions | Only used by operator |
Remarks | Loomis LSD-100 in use as Break System ; In general: scribing only for InP / GaAs Monocrystalline Semiconductors. |