Stripping of e-beam and optical resists, surface modification
Max. power 600 W @ 2.45 GHz, min power 200 W. Only oxygen available.
From single pieces of mm2 to 25 4 inch wafers in a waferboat or single 6 and 8 inch wafers
After a short training users will have to use the system by themselves
At high power possible wafer damage. Faraday cage available but not tested