Uniform layer spinning

Name

GYRSET CT 62

Application

Spinning of fotoresistlayers

Closed cover spinning of fotoresists : HPR , AZ , ma-N series.

Characteristics

Thickness indications extracted from spin-curves.

Highest level of uniform layer spinning.

Specimen

Wafer size < or = 3-inch

User conditions

Only used by operator

Remarks

Closed cover resist spinner