Sputtercoater (for SEM samples), Emitech

Sputtercoater with Quartz-crystal thickness-monitoring.

Name

Emitech K 550 X

Application

Conductive layer sputtering. Pd / Au coating on SEM samples

Characteristics

Pd / Au ~ 5 nms

Specimen

Maximum wafer size 2-inch

User conditions

Requires training or supervision

Remarks