Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems. As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.
The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.
Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.
On feedforward control using physics-guided neural networks: Training cost regularization and optimized initialization2022 European Control Conference, ECC 2022 (2022)
Generalization of ILC for fixed order reference trajectories using interpolation17th IEEE International Conference on Advanced Motion Control, AMC 2022 (2022)
On feedforward control of piezoelectric dual-stage actuator systems60th IEEE Conference on Decision and Control, CDC 2021 (2022)
Physics-guided neural networks for inversion-based feedforward control applied to linear motors5th IEEE Conference on Control Technology and Applications, CCTA 2021 (2022)
Active deformation control for a magnetically-levitated planar motor moverIEEE Transactions on Industry Applications (2022)
Current Educational Activities
- My full (paid) job: Dynamics & Control architect as a fellow, ASML EUV Mechatronic Systems Development