Qihao Yu
Department
RESEARCH PROFILE
Qihao Yu is a doctoral candidate in Power Electronics Lab (PEL/e), Electromechanics and Power Electronics Group (EPE) at Eindhoven University of Technology (TU/e). He is mainly working on power electronics systems for plasma processing in semiconductor manufacturing.
Endeavor to reach for high-hanging fruits.
ACADEMIC BACKGROUND
Qihao Yu received B.Sc. degree in Electrical Engineering and Automation from Zhejiang University, Hangzhou, China in 2017 and M.Sc. degree in Electrical Engineering with Cum Laude from Eindhoven University of Technology (TU/e), Eindhoven, the Netherlands in 2018.
Currently, he is working towards the Ph.D. degree in the Electromechanics and Power Electronics (EPE) Group, Electrical Engineering Department in TU/e. Since 2017, he has been a part-time engineer in Prodrive Technologies B.V., Son, the Netherlands. His research interests focus on high-performance power electronics for high-tech industrial applications, such as plasma etching/deposition in semiconductor manufacturing.
Recent Publications
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Qihao Yu,Erik Lemmen,Korneel Wijnands,Bas Vermulst
Accurate Ion Energy Control in Plasma Processing by Switched-Mode Power Converter
(2022) -
Qihao Yu,Erik Lemmen,Bas Vermulst,Adriaan J.M. Mackus,W.M.M. (Erwin) Kessels,Korneel Wijnands
Equivalent electric circuit model of accurate ion energy control with tailored waveform biasing
Plasma Sources Science and Technology (2022) -
Qihao Yu,Erik Lemmen,Korneel Wijnands,Bas Vermulst
Auto-Tuning Control of a Switched-Mode Power Converter for Tailored Pulse-Shape Biased Plasma Etching Applications
13th Annual Energy Conversion Congress and Exposition, ECCE 2021 (2021) -
Qihao Yu,Erik Lemmen,C.G.E. (Korneel) Wijnands,Bas J.D. Vermulst
Output Spectrum Modeling of an H-Bridge Inverter with Dead-Time Based on Switching Mode Analysis
IEEE Transactions on Power Electronics (2021) -
Qihao Yu,Erik Lemmen,C.G.E. (Korneel) Wijnands,Bas J.D. Vermulst
Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter
12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021 (2021)
Ancillary Activities
No ancillary activities