W.M.M. (Erwin) Kessels - Expertise

Kessels, W.M.M.
Address :
Technische Universiteit Eindhoven
P.O. Box 513
Department :
Department of Applied Physics
Section :
Plasma & Materials Processing
Positioncategory :
Professor (HGL)
Position :
Full Professor
Room :
FLX 3.092
Tel :
+31 40-247 3477
Tel (internal) :
Email :


  • E16000 - Nanotechnology
  • D12600 - Atomic physics and molecular physics
  • D12700 - Gases, fluid dynamics, plasma physics
  • Plasma physics
  • Solar cells


Research profile

Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.

Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.

Academic background

Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application.

He was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and he frequently (co-)organizes ALD-related workshops. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 250 papers, has given 80+ invited presentations, and holds 3 patents. He is also the founder of the blog and of the ALD Academy.