Advanced Single-Stage Planar Actuator
|Hans Rovers||PhD student|
|dr. ir. J.W. Jansen||Co-promotor|
|prof. dr. ir. J. Compter||Second-promotor|
|Prof. dr. E.A. Lomonova, M.Sc.||First promotor|
High-precision positioning stages are used in (e.g.) the semiconductor lithographic industry. A classic stage is a long-stroke linear actuator with air-bearings with a short-stroke actuator stacked on top. Nowadays, the air bearings are replaced with magnetic bearings.
The magnetically levitated planar actuator consists of a moving magnet plate levitating above a stationary coil set. This actuator offers long-stroke capability as well as nanometer accuracy. The advantage is that the magnet plate is fully contactless.
The ASPA project focuses on the design of a magnetically levitated moving-magnet planar actuator suitable for use in the lithographic industry.