Ultra High-precision Power Amplifier
|Jan Schellekens||PhD student|
|ir. M.A.M. Hendrix||Co-promotor|
|Prof. dr. E.A. Lomonova, M.Sc.||First promotor|
When looking at the trends of the technology roadmap in the semiconductor industry, it can be recognized that the high power switching amplifiers used in e.g. lithographic equipment are rapidly becoming a limiting factor. In order to satisfy the future requirements, the power rating of such amplifiers must increase by a factor of 8 in the next 5 years, while the generated noise and other disturbances are required to simultaneously decrease by a factor of 5. additionally, their bandwidth and accuracy must increase by orders of magnitude. A further complicating factor is that the reliability of the current amplifier systems is too low.
The UHPA project investigates power, control and sensor technologies needed to improve the existing amplifiers at essential points, namely; signal-to-noise ratio, disturbances and nonlinearities, power rating, reliability, and power density. This can only be achieved by utilizing state-of-the-art semiconductors and electronic components, together with advanced converter topology concepts, combined with advancedmeasurement and control systems.