Involved People
Kevin PlukPhD student
dr. ir. J.W. JansenCo-promotor
dr. ir. G. de GersemCo-promotor
Prof. dr. E.A. LomonovaFirst promotor

In the high-end semiconductor industry and high precision systems, (sub) nanometer accuracy is required. The currently applied motion systems consist of two stages with actuators. The long-stroke stage is used for the large movements and rough positioning, while a short-stroke stage is present for the accurate positioning. The positioning accuracy is gained in the high predictability and control of the short-stroke stage. The long-stroke actuator contains large permanent magnets which produce a large magnetic flux density. These strong magnetic fields influence the short-stroke actuators and, therefore, reduce the predictability of the short-stroke stage.

Every electromechanical actuator will have a magnetic field that is leaking outside (although it is very small usually). When placing multiple actuators close to each other, this magnetic leakage field will influence each other’s performance. This effect is called electromagnetic crosstalk.

TU/e is investigating the crosstalk in two-stage high precision machines. Electromagnetic crosstalk causes positioning errors of the short-stroke stage. This positioning errors can have tremendous influences, for instance complete batches of chips can be rejected due to defects in the circuits. To reduce the positioning errors, the crosstalk effects in a two-stage machine from the high-end industry are indicated. Compensational techniques to reduce the crosstalk (for instance shielding) are investigated and of the applicability of different modeling methods is researched.