Disturbance-based feedforward identification for active control of vibrations

Active vibration isolators are applied to isolate precision machines from floor vibrations. Data-driven feedforward control is applied, using measured floor accelerations as controller input. In addition, feedback controllers by measuring machine accelerations, velocities and displacements are used.

PhD Candidate: ir. Michiel Beijen
Supervisor: dr.ir. Marcel Heertjes
Promotor: prof.dr.ir. Maarten Steinbuch, prof.dr.ir. Hans Butler
Project Financing: Impuls I / ASML
Project Period: October 2013 – October 2017

Control performance in precision equipment in terms of positioning accuracies and settling times of its controlled sub-modules is limited by disturbances. Dealing with these disturbances through the application and development of feedforward identification and compensation techniques is the main topic of the project, which falls in the scope of active control of vibrations.

Active control of vibrations through disturbance-based feedforward control poses the following challenges:

  • The disturbances, which are assumed to be measured, are unknown in advance, ie. the feedforward compensation generally comes too late and thus could easily lead to performance degradation.
  • The disturbance transmission paths are often unknown, i.e. the physical models needed to design the feedforward controller, and which are partly based on these paths, are unknown. 

In view of these challenges, this project will focus on a mix of disturbance modeling and data-based feedforward designs with the aim to reduce positioning accuracies and settling times occurring in sub-modules of precision equipment. The project aims at theoretical and practical development of predictive techniques to optimize for the model description of the disturbance transmission paths.