Optical microscopes

Optical microscopy

Name

Polyvar Reichert Jung/Metalloplan Leitz/Jenatech

Application

Imaging of particles, defects; mask inspection.

Surface inspection during process-technology.

Characteristics

1250 X Magnification

Nomarski-polarized light

Specimen

< or = 3-inch wafers.

User conditions

Only used by operator.

Remarks