AJA Magnetron Sputtering Tool
Sputtering system equipped with 4 sputterguns in sputter-up-mode. | |
Name | AJA ATC 1500-F Sputtering System |
Application | Sputtering of Au, Ti, Ni, Cr, Pt ; RF-sputtering of isolators ; reactive gas sputtering of NbN. |
Characteristics | Stepcoverage. Standard recipes available. No thickness monitoring available. |
Specimen | Wafer size < or = 4-inch wafers |
User conditions | Use only after extensive training, loading/unloading in manual mode. |
Remarks |
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