Rapid Thermal Annealer 2, Jipelec
Rapid thermal annealer | |
Name | Jipilec Jetfirst 100/150 |
Application | Annealing Improving contact between metal and InGaAs |
Characteristics | Annealing with infrared light. Annealing of III-V materials with metals. |
Specimen | Max 3 inch |
User conditions | Only used by operator |
Remarks | Annealing at 350 °C. Only semiconductors/metals and cured polyimide allowed. |