Rapid Thermal Annealer 2, Jipelec

Rapid thermal annealer

Name

Jipilec Jetfirst 100/150

Application

Annealing

Improving contact between metal and InGaAs

Characteristics

Annealing with infrared light.

Annealing of III-V materials with metals.

Specimen

Max 3 inch

User conditions

Only used by operator

Remarks

Annealing at 350 °C. Only semiconductors/metals and cured polyimide allowed.