Sputtercoater for SEM samples, Emitech
Sputtercoater with Quartz-crystal thickness-monitoring. | |
Name | Emitech K 550 X |
Application | Conductive layer sputtering. Pd / Au coating on SEM samples |
Characteristics | Pd / Au ~ 5 nms |
Specimen | Maximum wafer size 2-inch |
User conditions | Requires training or supervision |
Remarks |
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