With this machine it is possible to allign and subsequently bond wafers. Several types of bonds are possible, i.e. anodic, fusion, adhesive and eutectic. The maximum applicable voltage is 2.5 kV; the maximum applicable force is 15 kN. Bondig can be performed under vacuum or under controlled N2.

Name

AML-AWB04

Application

Aligning and bonding silicon and quartz wafers, plan parallel substrates.

Characteristics

Aligning and subsequently bonding under vacuum or controlled N₂ pressure

Specimen

2" to 6" wafers

User conditions

1 day training

Remarks