Design of a long stroke translation stage for AFM

Tijdschriftartikel

Werner, C., Rosielle, P.C.J.N. & Steinbuch, M. (2010). Design of a long stroke translation stage for AFM. International journal of machine tools and manufacture, 50(2), 183-190. In Scopus Cited 34 times.

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Abstract

 

A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of a translation stage with a stroke of 1×1×1 mm and a custom-designed AFM measurement head. Here the design of the translation stage, consisting of elastic straight guides, Lorentz-actuators with weight and stiffness compensation and interferometric translation measurement systems, will be discussed. Some preliminary results on the performance of the actuation system are presented.