Advanced Single-Stage Planar Actuator

Involved People
Hans RoversPhD student
prof. dr. ir. J. CompterSecond-promotor
Prof. dr. E.A. Lomonova, M.Sc.First promotor

High-precision positioning stages are used in (e.g.) the semiconductor lithographic industry. A classic stage is a long-stroke linear actuator with air-bearings with a short-stroke actuator stacked on top. Nowadays, the air bearings are replaced with magnetic bearings.

The magnetically levitated planar actuator consists of a moving magnet plate levitating above a stationary coil set. This actuator offers long-stroke capability as well as nanometer accuracy. The advantage is that the magnet plate is fully contactless.

The ASPA project focuses on the design of a magnetically levitated moving-magnet planar actuator suitable for use in the lithographic industry.