HyPerMotion: Hybrid control for performance improvement of linear motion systems

This project proposes a fundamentally new perspective on high-performance control of linear motion systems by exploiting hybrid controllers. The use of hybrid control forms a major innovation that will enable substantial improvements in speed and accuracy of industrial motions systems such as wafer scanners, electron microscopes, copiers and robots.

PhD candidate: Bram Hunnekens (and project partner Bas van Loon)
Supervisor: dr. ir. Nathan van de Wouw
Promoter: prof. dr. Henk Nijmeijer
Project Funding: STW
Partners: ASML, Philips Innovation Services, FEI, Bosch, Assembleon, TMC.
Project Period: February 2011 - January 2015

We propose a fundamentally new perspective on high-performance control of linear motion systems by exploiting hybrid controllers. The ever increasing performance demands on the speed and accuracy of motion systems require essential innovations. The use of hybrid feedback control forms a major innovation that will enable substantial performance improvements of industrial motion systems such as wafer scanners, optical disc drives, electron microscopes, copiers and robots.

To meet the increasing performance demands in industry, the limitations present in the classical linear feedback design have to be overcome. This goal is central to this research project, which proposes a paradigm shift to hybrid feedback with the aim to remove these limitations. To enable this paradigm shift, the project will develop performance analysis and synthesis techniques for hybrid controllers for linear motion systems. The methods developed will be applied to industrial motion systems. The cases originate from the industrial users of this project and form benchmarks for large classes of industrial motion systems. By demonstrating the effectiveness of our innovative methods on their industrial cases, realistic proof-of-concepts will be provided that will be convincing for a broad industrial community.