Plasma Deposition Experiment 1

Customer

Research group Plasma & Materials Processing (P&MP), Professor R. van de Sanden, PhD, department Applied Physics TU/e

Omschrijving

Reactor where all the conditions are created to deposit or vapour deposit layers on surfaces using a plasma. (Polymers)

Characteristics

  • Industrial Siemens PLC controller with "InTouch" Proces Control Visualization, including Historical data logging and Trending
  • Plasma arc power 500V * 100A