Optical microscopes
Optical microscopy | |
Name | Polyvar Reichert Jung/Metalloplan Leitz/Jenatech |
Application | Imaging of particles, defects; mask inspection. Surface inspection during process-technology. |
Characteristics | 1250 X Magnification Nomarski-polarized light |
Specimen | < or = 3-inch wafers. |
User conditions | Only used by operator. |
Remarks |
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