X-ray diffractometer (XRD), PanAlytical
High Resolution X-Ray Diffraction for the analysis of phase composition, thickness, roughness and defects in the thin layers. Applied also for the analysis of polycrystalline and disordered materials and for analysis of artificial structures.
PanAlytical X'pert PRO MRD
Crystallographic measurements. Thin-film thickness measurement.
- Determination of crystal parameters by diffraction of high-energy X-rays.
High resolution X-ray diffraction.
- Rocking curves
Wafers up to 100 mm