MOVPE Aixtron Showerhead
Metal Organic Vapour Phase Epitaxy (MOVPE) reactor to grow epitaxial layers with the components In, Ga, As, P, and the doping materials Zn, Si, and Fe on InP wafers. | |
Name | Aixtron MOVPE 200/4 and 200 |
Application | Growing epitaxial layers Growing epitaxial layers on InP wafers |
Characteristics | Double reactor setup. - Growing epitaxial layers with the components In, Ga, As, P, Zn, Si, and Fe on InP wafers.
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Specimen | Maximal 2 inch wafers |
User conditions | Only used by operator |
Remarks |
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