ASML Pas 2500/40 stepper

Name

I-Line (365nm) stepper with working resolution of 0.7 micron

Application

IC production on 3, 4, 5 and 6 inch wafers.

Characteristics

The PAS 2500/40 stepper uses a 0.40NA i-line lens with a 21.1mm image field diameter.

This stepper is optimized for sub 0.7micron production resolutions using i-line processes.

Specimen

The system has been set up for 3" wafers, but should be able to handle 4, 5 and 6" too.

User conditions

Requires Engineering Support to Operate

Remarks

Equipment requires specific Masks and applies 5x reduction in Image size