Polymer layer spinning

Uniform layer spinning.

Name

Headway / Convac / Laurell spinners

Application

Spinning of polymerlayers. Spinning of fotoresist; PMMA / ZEP / HSQ ; Polyimide / BCB.

Characteristics

Thickness reproducibility. Thickness indications extracted from spincurves.

Specimen

Wafer size < or = 3-inch.

User conditions

Only used by operator

Remarks

Open cover spin processors