Polymer layer spinning
Uniform layer spinning. | |
Name | Headway / Convac / Laurell spinners |
Application | Spinning of polymerlayers. Spinning of fotoresist; PMMA / ZEP / HSQ ; Polyimide / BCB. |
Characteristics | Thickness reproducibility. Thickness indications extracted from spincurves. |
Specimen | Wafer size < or = 3-inch. |
User conditions | Only used by operator |
Remarks | Open cover spin processors |