Epitaxy equipment
One of the unique expert function within NanoLab@TU/e is the epitaxial growth of (mostly) III/V semiconductor material with MBE and MOVPE equipment
Epitaxy Equipment
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MBE Createc Metal
Molecular Beam Epitaxy (MBE) reactor to grow epitaxial layers with the components In, Ga, As and Al with the dopants Be and Si, on...
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MBE Createc II/IV/VI
Molecular Beam Epitaxy (MBE) reactor to grow epitaxial layers with the components In, Ga, As and Al with the dopants Be and Si, on...
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MBE Createc III/V
Molecular Beam Epitaxy (MBE) reactor to grow epitaxial layers with the components In, Ga, As and Al with the dopants Be and Si, on...
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MBE Veeco GENxplorer
Molecular Beam Epitaxy (MBE) reactor to grow epitaxial layers with the components In, Ga, As and Al with the dopants Be and Si, on...
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MOVPE Aixtron Dual Reactor
Metal Organic Vapour Phase Epitaxy (MOVPE) reactor to grow epitaxial layers with the components In, Ga, As, P, and the doping...
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MOVPE Aixtron Showerhead
Metal Organic Vapour Phase Epitaxy (MOVPE) reactor to grow epitaxial layers
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MOVPE Aixtron Multiwafer
Metal Organic Vapour Phase Epitaxy (MOVPE) multiwafer reactor to grow epitaxial layers
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