Au/Ag Thermal Evaporator, Edwards
Thermal evaporator | |
Name | Edwards Auto306 vacuum coating system |
Application | Deposition of thin Ag layers for contacts or Au for charge reduction on EBL |
Characteristics | Deposition of thin layers of Ag and Au in the range of tens of nanometers. |
Specimen | Maximum size 2 inch. |
User conditions | Requires training or supervision. |
Remarks |
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