Erik Langereis
Department / Institute
RESEARCH PROFILE
Starting April 2023, Erik Langereis works as University Lecturer at the department of Applied Physics & Science Education. Having obtained his PhD on research of Plasma-Assisted Atomic Layer Deposition (2008) as a versatile technique to deposit ultrathin films with ultimate control and conformality, he now is back at the department to fully focus on education and teaching. And with a drive to find inspiring ways to link the departmental research to the several bachelor courses.
With my enthusiam and fascination for physics and education, I like to train the next-generation TU/e professionals in recognizing the value of physics understanding for their careers. Hope to clearly integrate and connect to inspiring research and innovation at TU/e.
Recent Publications
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G. Ruhl,W. Lehnert,M. Lukosius,C. Wenger,C. Baristiran Kaynak,T. Blomberg,S. Haukka,P.K. Baumann,W.F.A. Besling,A.L. Roest
Dielectric material options for integrated capacitors
ECS Journal of Solid State Science and Technology (2014) -
H.C.M. Knoops,E. Langereis,M.C.M. Sanden, van de,W.M.M. Kessels
Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
Journal of Vacuum Science and Technology A (2012) -
N. Leick,R.O.F. Verkuijlen,L. Lamagna,E. Langereis,S.A. Rushworth,F. Roozeboom,M.C.M. Sanden, van de,W.M.M. Kessels
Atomic layer deposition of Ru from CpRu(CO2)Et using O2 gas and O2 plasma
Journal of Vacuum Science and Technology A (2011) -
E. Langereis,R.F.H. Roijmans,F. Roozeboom,M.C.M. Sanden, van de,W.M.M. Kessels
Remote plasma ALD of SrTiO3 using cyclopentadienlyl-based Ti and Sr precursors
Journal of the Electrochemical Society (2011) -
F. Roozeboom,E. Langereis,N. Leick,M.C.M. Sanden, van de,W.M.M. Kessels,J.H. Klootwijk,W. Dekkers,E. Tois,M. Tuominen,Y. Lamy
3D-integrated all-solid-state capacitors
(2010)
Current Educational Activities
Ancillary Activities
No ancillary activities