Tencor Surface profiler
Tencor Surface profiler. | |
Name | Tencor Alpha-Step IQ |
Application | Non-destructive step height measurement |
Characteristics | 10-20 nm resolution possible under optimum conditions. Data Survey Statistics |
Specimen | Wafer size < or = 4-inch wafers. |
User conditions | Only used by operator |
Remarks | Restrictions on measurements on uncured, solvent-rich polymer layers. |