Small equipment
-
Waferbonder, AML
With this machine it is possible to allign and subsequently bond wafers. Several types of bonds are possible, i.e. anodic, fusion,...
Read more -
Semi Automatic Wafer Bonder EVG 520IS
Semi Automatic Wafer Bonder EVG 520IS
Read more -
Rapid Thermal Annealer 1, Jipelec
Rapid thermal annealer, annealing of coated Si and glass substrates
Read more -
Rapid Thermal Annealer 2, Jipelec
Rapid thermal annealer, annealing of III-V materials with metals.
Read more -
Au/Ag Thermal Evaporator, Edwards
Thermal evaporator. Deposition of thin Ag layers for contacts or Au for charge reduction on EBL.
Read more -
Sputtercoater for SEM samples, Emitech
Sputtercoater with Quartz-crystal thickness-monitoring.
Read more -
Polymer Plasma stripper, Tepla
Read more -
Ionwave, Tepla
Ionwave, Tepla
Read more -
HMDS-primer deposition, Philips
Gas phase Deposition of HMDS-primer, improving fotoresist adhesion
Read more -
Critical Point Dryer
Drying and cleaning tool with critical point drying with CO2
Read more -
Mechanical / chemical polishing
Mechanical/chemical polishing. Within crystal cleaving, heat-sinking and reducing Ohmic resistance.
Read more -
Diamond tool scribers, Karl Suss and Loomis
Karl Suss, manual scriber ; Loomis PKR-99 ; Loomis LSD-100
Read more -
Brewer Science Equipment
Brewer Science Arf Processing Equipment, Spincoating / Baking / Development
Read more -
Resist deposition, GYRSET
Uniform layer spinning, Spinning of fotoresistlayers
Read more -
Silicet Unit
Silicet Unit
Read more -
Polymer layer spinning
Uniform layer spinning. Spinning of polymerlayers.
Read more -
Ceramic Hotplates, Praezitherm
Solvent Removing Digital Hotplate
Read more