Erik Langereis
Department / Institute
RESEARCH PROFILE
Starting April 2023, Erik Langereis works as University Lecturer at the department of Applied Physics & Science Education. Having obtained his PhD on research of Plasma-Assisted Atomic Layer Deposition (2008) as a versatile technique to deposit ultrathin films with ultimate control and conformality, he now is back at the department to fully focus on education and teaching. And with a drive to find inspiring ways to link the departmental research to the several bachelor courses.
With my enthusiam and fascination for physics and education, I like to train the next-generation TU/e professionals in recognizing the value of physics understanding for their careers. Hope to clearly integrate and connect to inspiring research and innovation at TU/e.
Recent Publications
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Dielectric material options for integrated capacitors
ECS Journal of Solid State Science and Technology (2014) -
Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
Journal of Vacuum Science and Technology A (2012) -
Atomic layer deposition of Ru from CpRu(CO2)Et using O2 gas and O2 plasma
Journal of Vacuum Science and Technology A (2011) -
Remote plasma ALD of SrTiO3 using cyclopentadienlyl-based Ti and Sr precursors
Journal of the Electrochemical Society (2011) -
3D-integrated all-solid-state capacitors
(2010)
Current Educational Activities
Ancillary Activities
No ancillary activities